The Nanotechnology Core Facility (NCF) at the University of Illinois Chicago is a versatile MEMS/nano facility. It includes an extensive set of micro- and nanofabrication tools housed within a Class 100 and Class 1000 cleanroom. As a research and development laboratory, NCF is dedicated to the application of integrated circuit and fiber-optic technology to improve manufacturing methods for MEMS/nano devices, bioMEMS, microfluidic, electromechanical, mechanical, chemical, optical, photonic, and multi-functional devices.

The Center for Nanoscale Materials (CNM) at Argonne National Laboratory is a premier user facility, providing expertise, instruments, and infrastructure for interdisciplinary nanoscience and nanotechnology research. It is one of five U.S. Department of Energy Office of Science Nanoscale Science Research Centers dedicated to nanoscience and nanotechnology. The center’s ability to fabricate complex nanostructures and devices is based on the advanced tool set housed within the Nanofabrication and Devices Group’s clean room. The clean room spans over 11,500 square feet and contains a great variety of nano- and microfabrication equipment.

The Marvell Nanofabrication Facility, located in the CITRIS headquarters building, Sutardja Dai Hall, includes more than 15,000 square feet of Class 100 and Class 1000 cleanroom. The Marvell NanoLab is a shared research center that provides more than 100 principal investigators and more than 500 academic and industrial researchers with a complete set of micro- and nanofabrication tools.